E01200 - SEMI E12 - Guide for Standardized Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow Controllers StdTpc-LCD Backlight Unit Physical characteristics specific to each

Physical characteristics specific to each component

This procedure describes a method to determine the MFC conversion factor and function between two gases

SEMI E126-0704 (technical revision)

SEMI E43-95 (first published)

SEMI E94-0200 (first published)

E01200 - SEMI E12 - Guide for Standardized Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow Controllers StdTpc-LCD Backlight Unit Physical characteristics specific to each1 Purpose 1. 1 This Guide is intended to provide a common basis for values of standard temperature and pressure when gas flow is expressed in standard volumetric units. 2 Scope 2. 1 This Standard provides a common basis for communication between manufacturers and users. This Standard is applicable to all gases and vapors used in semiconductor processing. Referenced SEMI Standards (purchase separately) None. Revision History SEMI E12 0421 (technical