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TEL Tokyo Electron 5087-400391-12 ARM-R COT Scan Assembly Lithius Working Spare Inventory # A-13610

$1256.10

Quantity
Description

Inventory # A-13610

5080-192421-11 CROSS ROLLER RING SCRA-X-50-0 2

PCB 30614310000

Part No: 0020-03626

MOTOR NP8148E003-2 1

TEL Tokyo Electron 5087-400391-12 ARM-R COT Scan Assembly Lithius Working Spare Inventory # A-13610TEL Tokyo Electron 5087 400391 12 ARM R COT Scan Assembly Lithius Working Spare Inventory # A 18747 Part No: 5087 400391 12 Model No: SCAN ASSY ARM R COT Coat Process Station Removed from a TEL Tokyo Electron Clean Track Lithius System Installed Components Sanyo Denki Stepping Motor Part No: 103H7851 70E1, StepSyn SMC Linear Actuator Part No: LG 96A A1 Parts List (approximation, parts may vary) Assembly Part No: 5087 400391 12 SCAN ASSY 5024 000118 11

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