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G03200 - SEMI G32 - カプセルなし熱抵抗測定用チップのガイドライン StdTpc-Photolithography Metrology This Specification is part of

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This Specification is part of a suite of Standards that specify the implementation of SEMI Standards for the Sensor/Actuator Network

This Specification covers the common characteristics of Al paste

35-1109E (editorial revision)

Originally published July 2003

this Test Method is suitable for use only with 2 mm thick

G03200 - SEMI G32 - カプセルなし熱抵抗測定用チップのガイドライン StdTpc-Photolithography Metrology This Specification is part ofglobal Assembly & Packaging Technical Committee201171global Audits and Reviews Subcommittee20118www. semiviews. org www. semi. org1994 : 1 ! VLSI 3. 2 Referenced SEMI Standards None.

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