D01300 - SEMI D13 - FPD用カラーフィルタの用語 StdPbc-0919

D01300 - SEMI D13 - FPD用カラーフィルタの用語 StdPbc-0919global Flat Panel Display Color Filters & Optical Elements Committee2008513global Audits and Reviews Subcommittee20086www. semi. org20087CD ROM1995200111 FPDCFCF Referenced SEMI Standards SEMI D3 Quality Area Specification for Flat Panel Display Substrates SEMI D20 Terminology for FPD Mask Defect SEMI D21 Terminology for FPD Mask Pattern Accuracy SEMI M21 Guide for Assigning Addresses to Rectangular Elements in a Cartesian Array

This edition was approved for publication by the global Audits and Reviews Subcommittee on August 25

provide a map between EFEM functional elements and existing standards

SEMI S22-0706b (delayed revision)

The nominal volume of the canister which is over 40 liters is exempted from the scope

Method A is recommended for examining the edge profile of flatted regions of the wafer

The growing volume of production of poly-Si and sog-Si requires also an increase of quality control for these materials

SEMI PV59-0115 (first published)

atmospheric contaminant trending analysis

2% (1 × 1020 atoms/cm3) for oxygen

reduces stray light

本スタンダードは，global Silicon Wafer Committeeで技術的に承認されている。現版は2008年8月29日，global Audits and Reviews Subcommitteeにて発行が承認された。2008年10月にwww

SEMI C2 — Specifications for Etchants