F10600 - SEMI F106 - Test Method for Determination of Leak Integrity of Gas Delivery Systems by Helium Leak Detector Revision:SEMI F106-0308 - Superseded This Specification is a guideline

This Specification is a guideline for high volume production of leadframes

自家使用のため内部で堆積を行う組織，および販売目的で堆積物を製造する会社は共に，彼らのパーティクル堆積システムがSEMI M52の要求を満たす堆積を保証するため，本テスト方法を適用することが出来る。

本ガイドでは，シリコンウェーハの仕様書の発注情報の項を作成する方法に関する情報を提供する。

SEMI E134-0313 (technical revision)

The notations of crystallographic orientation are unified to prevent possible misunderstandings

F10600 - SEMI F106 - Test Method for Determination of Leak Integrity of Gas Delivery Systems by Helium Leak Detector Revision:SEMI F106-0308 - Superseded This Specification is a guidelineThis Standard was technically approved by the global Facilities Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 30, 2012. Available at www. semiviews. org and www. semi. org in October 2012; originally published March 2008. This Document defines the inboard helium leak test method for gas delivery systems. It covers both conventional metal face sealing and surface mount gas