E02400 - SEMI E24 - クラスタツール・モジュール・インタフェース： 隔離バルブインタロックのスタンダード Revision:SEMI E24-92 (Withdrawn 0710) - Withdrawn SEMI MF1388 — Test Method

SEMI MF1388 — Test Method for Generation Lifetime and Generation Velocity of Silicon Material by Capacitance-Time Measurements of Metal-Oxide-Silicon (MOS) Capacitors

which refer to this Standard

Thus consideration must be given to structures and analyses that properly take these effects into account

The purpose of this Specification is to enhance the capabilities of the parallel I/O interface defined in SEMI E23 in order to support improvements in the reliability and efficiency of carrier transfer

will be delineated in supporting ‘dot’ specifications to this Standard

E02400 - SEMI E24 - クラスタツール・モジュール・インタフェース： 隔離バルブインタロックのスタンダード Revision:SEMI E24-92 (Withdrawn 0710) - Withdrawn SEMI MF1388 — Test MethodGlobal Physical Interfaces & Carriers Committee2010430Global Audits and Reviews Subcommittee20106www. semi. org199220047 2010 Referenced SEMI Standards SEMI E21 Cluster Tool Module Interface: Mechanical Interface and Wafer Transport Standard