P01500 - SEMI P15 - Determination of Sodium and Potassium in Positive Photoresist Metal Ion Free (MIF) Developers by Atomic Absorption Spectroscopy Revision:SEMI P15-92 (Reapproved 1104) - Inactive This Standard specifies EUV Pod

This Standard specifies EUV Pod for the 150 mm Extreme Ultraviolet Lithography (EUVL) reticle

1 150mm鏡面研磨単結晶シリコンウェーハ（オリフラあり，セカンダリフラットなし，T/3エッジプロファイル）

The specification recognizes only two discrete material forms monocrystalline and multicrystalline

These guidelines apply to minienvironments used in the manufacturing

SEMI T20-0710 (designation update)

P01500 - SEMI P15 - Determination of Sodium and Potassium in Positive Photoresist Metal Ion Free (MIF) Developers by Atomic Absorption Spectroscopy Revision:SEMI P15-92 (Reapproved 1104) - Inactive This Standard specifies EUV PodThis standard was technically approved by the Global Micropatterning Committee and is the direct responsibility of the North American Micropatterning Committee. Current edition approved by the North American Regional Standards Committee on July 11, 2004. Initially available at www. semi. org September 2004; to be published November 2004. Originally published in 1992. NOTICE: This Standard or Safety Guideline has an Inactive Status because the