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M07500 - SEMI M75 - Specification for Polished Monocrystalline Gallium Antimonide Wafers Revision:SEMI M75-0309 - Superseded Behavior and Service

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Behavior and Service

SEMI E88-1104 (technical revision)

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SEMI E87-0709 (technical revision)

2-0211 (technical revision)

M07500 - SEMI M75 - Specification for Polished Monocrystalline Gallium Antimonide Wafers Revision:SEMI M75-0309 - Superseded Behavior and ServiceThe purpose of this Document is to define standard descriptions for the parameters to be specified in the procurement and supply of round wafers of gallium antimonide (GaSb) monocrystalline material. This Specification covers the information required for the procurement of round, flatted GaSb wafers and the standard dimensional and orientation conventions for the supply of such wafers. Referenced SEMI StandardsSEMI MF26 Test Method for Determining the

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