P02700 - SEMI P27 - Parameter Checklist for Resist Thickness Measurement on a Substrate StdPbc-0220 production equipment including process and

production equipment including process and metrology equipment

This Guide can be used as a guide by semiconductor manufacturers and cleanroom facilities designers during the design of their facilities

SEMI PV64-0714 (Reapproved 0121)

表面に存在する静電気電荷は，半導体製造環境の中で多くの望ましくない効果を引き起こす｡

SEMI E87-0301 (technical revision)

P02700 - SEMI P27 - Parameter Checklist for Resist Thickness Measurement on a Substrate StdPbc-0220 production equipment including process andThis checklist was technically approved by the Global Micropatterning Committee and is the direct responsibility of the Japanese Micropatterning Committee. Current edition approved by the Japanese Regional Standards Committee on April 28, 2003. Initially available at www. semi. org June 2003; to be published July 2003. Originally published in 1996. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain