P01800 - SEMI P18 - Specification for Overlay Capabilities of Wafer Steppers StdPbc-0714 with an MFC that has

with an MFC that has been equalized to ambient conditions for 24 hours before the application of power

本スタンダードは，global Silicon Wafer Committeeで技術的に承認されている。現版は2010年8月27日， global Audits & Reviews Subcommitteeにて発行が承認された。2010年10月にwww

SEMI D45-0706 (Reapproved 0412)

この安全ガイドラインは，危険性ガスのFLDを取り扱うものである。これらのデバイスは，FLDあるいはその下流で，制御されない放出の流量を制限することを意図している。

This Guide is intended to address the needs of the 3D Stacked IC (3DS-IC) industry by defining the items/parameters needed to procure virgin silicon carrier wafers to be used in a 3DS-IC process

P01800 - SEMI P18 - Specification for Overlay Capabilities of Wafer Steppers StdPbc-0714 with an MFC that hasNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. Definitions for the overlay capabilities of wafer steppers are established, consistent with the primary application of wafer stepper (i. e., the manufacturing of very large scale integrated circuits). Also included are