E12000 - SEMI E120 - COMMON EQUIPMENT MODEL 사양 Revision:SEMI E120-0414 - Superseded This Document specifies how sensor/actuator/controller

This Document specifies how sensor/actuator/controller devices interoperate on the network specific for the MECHATROLINK Public specification referenced in § 4

orgで，そして2007年7月にCD-ROMで入手可能となる。初版は2000年6月発行，前版は2001年11月に発行された。

2 dichloroethylene for which a need has been identified

SEMI 3D7-0913 (first published)

This Guide applies to data collected to support establishment of a SEMI Process Chemicals or Gases Specification or verification of performance to such a SEMI Specification

E12000 - SEMI E120 - COMMON EQUIPMENT MODEL 사양 Revision:SEMI E120-0414 - Superseded This Document specifies how sensor/actuator/controllerThis Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 23, 2013. Available at www. semiviews. org and www. semi. org in April 2014; originally published March 2003; previously published March 2010. The purpose of this Specification is to provide a generally applicable object model of semiconductor equipment