S01800 - SEMI S18 - 可燃性シリコン化合物の環境，健康，安全に関するガイドライン StdPbc-0823

S01800 - SEMI S18 - 可燃性シリコン化合物の環境，健康，安全に関するガイドライン StdPbc-0823global Environmental Health & Safety Technical Committee20111224global Audits and Reviews Subcommittee20123www. semiviews. org www. semi. org200211 : 2011 FPDPV 1 Referenced SEMI Standards SEMI F1 Specification for Leak Integrity of High Purity Gas Piping Systems and Components SEMI F5 Guide for Gaseous Effluent Handling SEMI F6 Guide for Secondary Containment of Hazardous Gas Piping Systems SEMI S1 Safety Guideline for Equipment Safety Labels SEMI S2

This Test Method is intended primarily for use on electronic materials in the form of nominally circular edge-contoured wafers with flat lengths up to 65 mm

This Specification defines the geometric and spatial limits of the alphanumeric code

orgで入手可能となる。初版は1997年発行。前版は2005年11月発行。

1-1107 (technical revision)

SEMI G56-0318 (technical revision)

originally published in 1994

the user of this Document can generate specifications for silicon annealed wafers

SEMI E47-0301 (Reapproved 1106)

The order of the data items may be restricted by an application document

The final goal of this Standard is to realize the traceability of semiconductor

this Test Method provides a procedure for testing the outgassing of organic compounds in a complete minienvironment

and SEMI E137