E02200 - SEMI E22 - Specification for Cluster Tool Module Interface: Transport Module End Effector Exclusion Volume StdTpc-Terminology This Specification provides for a

This Specification provides for a standardized OC location in support of future unification of the OC cut shape as well as location

11-1106 (Reapproved 1211)

originally published June 2013

SEMI E129 — Guide to Assess and Control Electrostatic Charge in a Semiconductor Manufacturing Facility

such as wafer carriers and wands

E02200 - SEMI E22 - Specification for Cluster Tool Module Interface: Transport Module End Effector Exclusion Volume StdTpc-Terminology This Specification provides for aNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. The purpose of this Specification is to provide sufficient detail to allow the transport module end effector to move wafers to and from process and cassette modules in a cluster tool without mechanical interference. This