E17100 - SEMI E171 - Specification for Predictive Carrier Logistics (PCL) Revision:SEMI E171-0524 - Current SEMI MF657 — Test Method

SEMI MF657 — Test Method for Measuring Warp and Total Thickness Variation on Silicon Slices and Wafers by a Noncontact Scanning Method

Consequently

the need to accurately determine roughness of polymer surfaces is important when evaluating fluid handling system components from various sources

and SEMI E137

2 The GEM Standard is intended to specify the following:

E17100 - SEMI E171 - Specification for Predictive Carrier Logistics (PCL) Revision:SEMI E171-0524 - Current SEMI MF657 — Test MethodThe purpose of this Standard is to provide a communication scheme for exchanges of carrier logistics related information, especially predictive information, between equipment and the factory system in order to support seamless cascading of carriers for continuous processing of equipment in semiconductor fabrication systems or similar ones. The purpose of this Standard is to provide models which represent carrier logistics management status in