P01000 - SEMI P10 - Specification of Data Structures for Photomask Orders StdVol-Facilities critical and supercritical applications in

critical and supercritical applications in the semiconductor industry

EtherNet/IPでは，DeviceNet （SEMI E54

SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)

クラックが発生したウエハは，モジュール生産工程で破損する場合があり生産性の低下やコストアップの原因になる。また，破損したウエハは太陽電池モジュールの信頼性の低下の原因になる。

SEMI E125-0709 (technical revision)

P01000 - SEMI P10 - Specification of Data Structures for Photomask Orders StdVol-Facilities critical and supercritical applications inNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. These data structure specifications are intended to facilitate the transmittal of mask order data between software systems to allow: automated order placement by mask customers and to allow the automatic processing of such