E08200 - SEMI E82 - Specification for Interbay/Intrabay AMHS SEM (IBSEM) Revision:SEMI E82-1105 - Superseded It could also include a

It could also include a sensor that is part of the default configuration of the equipment

and packaging houses

The document will serve to clarify cost reduction items as well as benchmark cost reduction activities

Wafer Manufacturing

and analytical procedures for the gases listed in the index

E08200 - SEMI E82 - Specification for Interbay/Intrabay AMHS SEM (IBSEM) Revision:SEMI E82-1105 - Superseded It could also include aThis Standard establishes a Specific Equipment Model (SEM) for interbay and intrabay AMHS transport equipment (IBSEM). The model consists of equipment characteristics and behaviors that are to be implemented in addition to the SEMI E30 fundamental requirements and selected additional capabilities. The intent of this Standard is to facilitate the integration of IBSEM equipment into an automated (e. g., semiconductor fabrication and flat panel display)