G09400 - SEMI G94 - Specification for Coin-Stack Type Tape Frame Shipping Container for 300 mm Wafer Revision:SEMI G94-0113 (Reapproved 1123) - Current SEMI HB10-1018 (first published)

SEMI HB10-1018 (first published)

This mandates test methods of organic compounds on wafer surfaces

SEMI M73-0309 (technical revision)

The purpose of this method is to provide a standardized method for quantifying the warm-up time of a mass flow controller (MFC)

SEMI MF1527 — Guide for Application of Silicon Standard Reference Materials and Reference Wafers for Calibration and Control of Instruments for Measuring Resistivity of Silicon

G09400 - SEMI G94 - Specification for Coin-Stack Type Tape Frame Shipping Container for 300 mm Wafer Revision:SEMI G94-0113 (Reapproved 1123) - Current SEMI HB10-1018 (first published)This Specification defines the dimensions of container and requirements for securing the interface between container and processing equipment or wafer transportation equipment. This Standard specifies the requirements for wafer spacers used for separation of wafers and for a cushion material used for wafer protection. This Standard specifies the electrical characteristics and requirements for hazardous substance for the material of container. The