E07800 - SEMI E78 - Guide to Assess and Control Electrostatic Discharge (ESD) and Electrostatic Attraction (ESA) for Equipment Revision:SEMI E78-0706 - Superseded the customer may want to

the customer may want to reference SEMI M1

1-1017 (technical revision)

SEMI T9 — Specification for Marking of Metal Lead-Frame Strips with a Two-Dimensional Data Matrix Code Symbol

Loading and unloading is assumed to take place in semi-automated and automated mode by using any kind of system or device (i

装置情報システムによってサポートされるべき役割

E07800 - SEMI E78 - Guide to Assess and Control Electrostatic Discharge (ESD) and Electrostatic Attraction (ESA) for Equipment Revision:SEMI E78-0706 - Superseded the customer may want toThe purpose of this Guide is to minimize the negative impact on productivity caused by static charge and electric fields in semiconductor manufacturing equipment. It is a guide for establishing electrostatic compatibility of equipment used in semiconductor manufacturing. Electrostatic compatibility in the entire semiconductor factory is addressed in SEMI E129. Electrostatic surface charge causes a number of undesirable effects in semiconductor