TEL Tokyo Electron 200mm IFB Interface Block Robotics Arm ACT12 Spare Surplus PCB Part No: AF CONT

PCB Part No: AF CONT 2 3P-578

One of them has been dropped

Model No: TYB517-1/IOAS-LF

Part No: 0020-99050 Model No:

PLATE(COL) SET

TEL Tokyo Electron 200mm IFB Interface Block Robotics Arm ACT12 Spare Surplus PCB Part No: AF CONTTEL Tokyo Electron 200mm IFB Interface Block Robotics Arm ACT12 No End Effector Model No: IFB Interface Block Robotics Arm Removed from a TEL Tokyo Electron Clean Track ACT12 200 200mm System Installed Components NSK Part No: MU U177 001 NSK Part No: JS2006FN509 NSK Part No: XY HRS55ZM123 Part No: 2987 416026 W2 IRA (ACT12 IPL), Y AXIS Part No: 2987 416028 W4 IRA (ACT12 IPL), Z AXIS Part No: 2987 416027 W1 IRA (ACT12 IPL), THETA AXIS Part No: 2987