HB00700 - SEMI HB7 - Test Method for Measurement of Waviness of Crystalline Sapphire Wafers by Using Optical Probes Revision:SEMI HB7-0615 - Current This Document is a guide

This Document is a guide to a test method to determine gas change/purge efficiency of gas delivery system

The purpose of this Standard is to provide recommendations for developing and delivering equipment training so that it is performance-based

シリコンエピタキシャルウェーハの中には，エピタキシャル層の下に埋め込み層が形成されているものがある。 本仕様はそのような埋め込み層付きのエピタキシャルウェーハの特性について規定するものである。

This edition was approved for publication by the global Audits and Reviews Subcommittee on December 16

SEMI M56-1018 (technical revision)

HB00700 - SEMI HB7 - Test Method for Measurement of Waviness of Crystalline Sapphire Wafers by Using Optical Probes Revision:SEMI HB7-0615 - Current This Document is a guideThis Standard was technically approved by the HB LED Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 19, 2015. Available at www. semiviews. org and www. semi. org in June 2015. Crystalline sapphire wafers (CSW) are used as substrates for manufacturing compound semiconductor devices, in particular high brightness light emitting diodes (HB LED). In SEMI HB1 a multitude of