E08300 - SEMI E83 - Specification for PGV Mechanical Docking Flange Revision:SEMI E83-1106 - Superseded The specific format and protocol

The specific format and protocol implementation of these interface specifications

This Document provides a standardized test method for measuring one of the most basic characteristics of CSW

本仕様は，半導体パワー用デバイス／IC製造用のシリコン・オン・インシュレーター（SOI）ウェーハに関する要求条件を規定している。試験方法と受入基準を定義することによって，ユーザとサプライヤの両者は製品の特性と品質に関する要求条件を明確にすることができる。

SEMI M9 — Specification for Polished Monocrystalline Gallium Arsenide Slices

Boron-Doped

E08300 - SEMI E83 - Specification for PGV Mechanical Docking Flange Revision:SEMI E83-1106 - Superseded The specific format and protocolNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. This Specification is intended to promote consistent interface features between person guided vehicles (PGV) and equipment with a load port. This Specification defines a mechanical standard for the stationary (equipment)