E05403 - SEMI E54.3 - Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device Revision:SEMI E54.3-0698 (Reapproved 0721) - Current originally published March 2009

originally published March 2009

1  This Standard establishes practices for measuring selected characteristics of FPD color filters

SEMI E16-0624 (technical revision)

orgで，そして2009年3月にCD-ROMで入手可能となる。初版は2002年11月に発行された。

future semiconductor factories will use extensive automated material handling systems (AMHS) to transfer wafer carriers

E05403 - SEMI E54.3 - Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device Revision:SEMI E54.3-0698 (Reapproved 0721) - Current originally published March 2009NOTICE: This Document is no longer published with the SEMI E54 suite of Standards. It is published and sold separately. NOTICE: This Document was reapproved with minor editorial changes. This Specification is part of a suite of Standards which specify the implementation of SEMI Standards for the Sensor Actuator Network. The specific purpose of this Specification is to describe a network independent application model comprised of device objects which