Novellus 04-310372-00 Water Flow Switch Upgrade Kit New Surplus Removed from a Hitachi M-511E

Removed from a Hitachi M-511E Microwave Plasma Etching System This Hitachi SBC09-2 PCB Card is used working surplus

Solid State Relay Part No: 4022

Estimated Packed Shipping Dimensions: L x W x H = 33"x30"x51" @ 175 lbs

img{max-width:100%} Schumacher 1491-7037G Refill Controller Model SCM TFL Working Surplus

Lam Research Part No: 707-098570-104

Novellus 04-310372-00 Water Flow Switch Upgrade Kit New Surplus Removed from a Hitachi M-511ENovellus 04 310372 00 Water Flow Switch Upgrade Kit New Surplus Part No: 04 310372 00 KIT,UPGRADE,WATER FLOW SWITCH,STD,C3,SPD Included Components Part No: 62 310292 00 Part No: 34 307417 00 Part No: 17 311891 00 Part No: 22 00199 00 Part No: 31 033009 00 Part No: 20 033967 00 (Qty. 4) Part No: 03 309042 00 Part No: 21 041264 04 (Qty. 2) Part No: 22 294469 000 Part No: 21 042022 04 (Qty. 2) Part No: 21 042024 03 (Qty. 2) Part No: 21 041903 06 (Qty. 4)